Investigations into the Power MOSFET SEGR Phenomenon and Its Physical Mechanism

نویسنده

  • A. H. Johnston
چکیده

INTRODUCTION The state of understanding of the destructive SEGR event in power MOSFETS is relatively mature with large published efRorts, both experimental [1-5] and theoretical [6-8]. However, gaps remain in the understanding of the phenomenon, including unexplained experimental anomalies, empirical-only dependencies on some important device and incident ion physical parameters, and limited insight into latent effects. This paper’s purpose is to shed light on some of these using a selected range of real-world devices. In subjecting these devices to the usual accelerator experiments, during-irradiation current signatures were anal yzcd for the first time. To augment the heavy ion experiments, doping profiles and gate oxide thicknesses were measured and PISCES-based analyses were performed, Finally, post-SEGR failure investigations were conducted. These results yield new parametric correlations and physical insights into the SEGR failure mechanism.

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تاریخ انتشار 1999